Monte Carlo modeling of electron beam physical vapor deposition of yttrium
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چکیده
منابع مشابه
Direct simulation Monte Carlo study of effects of thermal nonuniformities in electron-beam physical vapor deposition
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2000
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.1310656